Laboratory Equipment & Services Information System by Centralized Laboratory Management Office (CeLMO)

Ultrapure water is a type of water that has been purified to the highest levels of purity for all contaminant types, including organic and inorganic compounds, dissolved and particulate matter, volatile and non-volatile, reactive, and inert, hydrophilic and hydrophobic, and dissolved gases . It is used in various applications such as HPLC, LC-MS, GC-MS, GFAAS, PCR, and trace analysis 2. Ultrapure water is not the same as deionized water. A typical ultrapure water system has three stages: a pretreatment stage to produce purified water, a primary stage to further purify the water, and a polishing stage, which is the most expensive part of the treatment process 1. The most widely used requirements for ultrapure water quality are documented by ASTM D5127 “Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries” and SEMI F63 “Guide for ultrapure water used in semiconductor processing” .